OLED

OLED (Organic Light Emitting Diodes) is a flat light emitting technology, made by placing a series of organic thin films between two conductors. When electrical current is applied, a bright light is emitted. OLEDs can be used to make displays and lighting. Because OLEDs emit light they do not require a backlight and so are thinner and more efficient than LCD displays.

In the fabrication of OLED/Flex OLED devices and flat panel displays numerous process tools are used. ASM team is hands-on with design and development of systems/ sub systems for:

• Deposition (PVD/ ALD etc.), Etch, CMP and related process tools:
  • Transfer chambers/ main frame, vacuum chambers and accessories – Ultra high vacuum, high temperature environment
  • Chamber support structures
  • Substrate support and handling systems – high vacuum and high temperature environment
• Inspection/ Metrology equipment
• Substrate transfer systems
• Precision motion control systems
• Precision Mechanisms – Foup transfer units and related sub systems